Thermodynamic and kinetic properties of indium-implanted silicon I: Moderate temperature recovery of the implant damage and metastability effects

✍ Scribed by G.F. Cerofolini; G. Ferla; G.U. Pignatel; F. Riva; G. Ottaviani

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 612 KB
• Volume: 101
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(83)90253-5