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Thermochromic VO2 thin films synthesized by rf-inverted cylindrical magnetron sputtering

✍ Scribed by J.B. Kana Kana; J.M. Ndjaka; P. Owono Ateba; B.D. Ngom; N. Manyala; O. Nemraoui; A.C. Beye; M. Maaza

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 757 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2007.12.021

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✦ Synopsis

The novel physical vapor deposition called inverted cylindrical magnetron sputtering (also known as hollow cathode sputtering) is commonly used to coat wires, fibers, ribbons as well as all sides of three-dimensional substrates. It is a reproducible method for the production of nanostructured systems onto complex shapes substrates. This paper reports the first synthesis and feasibility of reliably reproduced stoichiometric pure textured VO 2 nano-structures by the rf-inverted cylindrical magnetron sputtering. Morphological, structural, elemental analysis and optical properties of synthesized VO 2 under optimized conditions are reported.

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