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Thermal stability of W on RTCVD Si1-xGex films

✍ Scribed by V. Aubry; F. Meyer; R. Laval; C. Clerc; P. Warren; D. Dutartre

Book ID: 103616557
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 413 KB
Volume: 73
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90181-a

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