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Thermal stability of multilayer films Pt/Si, W/Si, Mo/Si, and W/C

✍ Scribed by Jiang, Zuimin; Jiang, Xiaoming; Liu, Wenhan; Wu, Ziqin

Book ID: 111930992
Publisher: American Institute of Physics
Year: 1989
Tongue: English
Weight: 665 KB
Volume: 65
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.342569

No coin nor oath required. For personal study only.

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