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Long-term stability of a Mo/Si multilayer structure

✍ Scribed by Barbee, T. W. ;Rife, J. C. ;Hunter, W. R. ;Kowalski, M. P. ;Cruddace, R. G. ;Seely, J. F.

Book ID
115342958
Publisher
The Optical Society
Year
1993
Tongue
English
Weight
303 KB
Volume
32
Category
Article
ISSN
1559-128X

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## Abstract Combined approach based on X‐ray reflectometry (XRR), atomic‐force microscopy (AFM), and small‐angle X‐ray scattering (SAXS) has been applied to two series of multilayer Mo/Si mirrors grown by magnetron sputtering on standard and specially smoothed substrates under different technologic