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Structural evaluation of a Mo/Si multilayer, analyzed with various wavelengths

✍ Scribed by Y. Ito; T. Mukoyama; K. Omote; K. Shimizu; A. Nisawa; T. Shoji; H. Terauchi; S. Kuehner

Book ID
113284274
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
374 KB
Volume
75
Category
Article
ISSN
0168-583X

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A SiC/Mo-Si multilayer coating was prepared on the surface of C/SiC composites by chemical vapor deposition (CVD) combined with slurry painting. The coating was composed of a dense CVD SiC coating alternating with a porous Mo-Si layer. From inside to outisde the coating consisted of CVD SiC, Mo-Si,