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Surface roughness and interface diffusion studies on thin Mo and W films and Mo/Si and W/Si interfaces

✍ Scribed by D. Bhattacharyya; A.K. Poswal; M. Senthilkumar; P.V. Satyam; A.K. Balamurugan; A.K. Tyagi; N.C. Das


Book ID
108418075
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
398 KB
Volume
214
Category
Article
ISSN
0169-4332

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