Interface roughness, surface roughness and soft X-ray reflectivity of Mo/Si multilayers with different layer number

✍ Scribed by Junling Qin; Jianda Shao; Kui Yi; Zhengxiu Fan

• Book ID: 115367800
• Publisher: Optics InfoBase
• Year: 2007
• Tongue: English
• Weight: 247 KB
• Volume: 5
• Category: Article
• ISSN: 1671-7694
• DOI: 10.3788/COL20070505.0301