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Ellipsometric study of Si surface roughness and the SiSiO2 interface

✍ Scribed by A Aizenberg; AV Andrianov; SV Nosenko; VI Pshenicin; IA Hromcovski


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
125 KB
Volume
42
Category
Article
ISSN
0042-207X

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