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Thermal redistribution of boron implants in bulk silicon and SOS type structures

✍ Scribed by C. D. Maldonado; S. A. Louie

Book ID: 104843893
Publisher: Springer
Year: 1982
Tongue: English
Weight: 979 KB
Volume: 27
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00619083

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