✦ LIBER ✦
Characterization of defect reduction and aluminum redistribution in silicon implanted SOS films
✍ Scribed by Ronald E. Reedy; Thomas W. Sigmon
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 699 KB
- Volume
- 58
- Category
- Article
- ISSN
- 0022-0248
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