Comparison of phosphorus, arsenic and boron implants into bulk silicon and SOS : Kostas Amberiadis, Michael R. Kump and Charles W. Magee. Solid-St. Electron.33(6), 651 (1990)

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 129 KB
• Volume: 32
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(92)90256-k