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Thermal redistribution of Al implanted in Si: evidences for interactions with extended defects

✍ Scribed by Ch. Ortiz; J.J. Grob; D. Mathiot; A. Claverie; Ch. Dubois; R. Jérisian


Book ID
114170547
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
161 KB
Volume
147
Category
Article
ISSN
0168-583X

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