Boron interaction with extended defects induced by He–H co-implantation in Si

✍ Scribed by G. Gaudin; F. Cayrel; C. Bongiorno; R. Jérisian; C. Dubois; V. Raineri; D. Alquier

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 174 KB
• Volume: 124-125
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2005.08.080