𝔖 Bobbio Scriptorium
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Theoretical analysis of sputter profiling

✍ Scribed by Remmerie, J.; Maes, H.E.

Book ID
121986953
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
486 KB
Volume
40
Category
Article
ISSN
0584-8547

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## Abstract We study theoretically the distortion of marker layers embedded in homogeneous media due to energetic ion bombardment. For realistic relocation cross‐sections, we have solved the balance equation, first proposed by Sigmund and co‐workers, for the evolution of irradiated polyatomic targe