𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Sputter depth profiling of InN layers

✍ Scribed by R Kosiba; G Ecke; V Cimalla; L Spieß; S Krischok; J.A Schaefer; O Ambacher; W.J Schaff

Book ID
113822581
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
739 KB
Volume
215
Category
Article
ISSN
0168-583X

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Sputter depth profile analysis of marker
Sputter depth profile analysis of marker layers
✍ J. A. Peinador; I. Abril; J. J. Jiménez-Rodríguez; A. Gras-Marti 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 314 KB

## Abstract We study theoretically the distortion of marker layers embedded in homogeneous media due to energetic ion bombardment. For realistic relocation cross‐sections, we have solved the balance equation, first proposed by Sigmund and co‐workers, for the evolution of irradiated polyatomic targe