𝔖 Bobbio Scriptorium

✦ LIBER ✦

The use of submicrometer electron-beam lithography for fabricating 4-kbit CCD memory arrays

✍ Scribed by Henderson, R.C.; Reiner, T.; Coppen, P.J.

Book ID: 114592688
Publisher: IEEE
Year: 1978
Tongue: English
Weight: 567 KB
Volume: 25
Category: Article
ISSN: 0018-9383
DOI: 10.1109/t-ed.1978.19099

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Useful and cost efficient fabrication of

Useful and cost efficient fabrication of dot arrays for photonic crystals by direct write electron-beam lithography

✍ R. Steingrüber; S. Golka; H. Heidrich 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 431 KB

Micro-Nanostructured Interfaces Fabricat

Micro-Nanostructured Interfaces Fabricated by the Use of Inorganic Block Copolymer Micellar Monolayers as Negative Resist for Electron-Beam Lithography

✍ R. Glass; M. Arnold; J. Blümmel; A. Küller; M. Möller; J.P. Spatz 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 446 KB 👁 1 views

A feasibility study for the fabrication

A feasibility study for the fabrication of planar silicon multichip modules using electron beam lithography for precise location and interconnection of chips

✍ Hopper, A.; Jones, A.; Augur, R.A.; Fice, M.J.; Blythe, S.; Ahmed, H. 📂 Article 📅 1992 🏛 IEEE 🌐 English ⚖ 839 KB

Electron beam/optical hybrid lithography

Electron beam/optical hybrid lithography for the production of gallium arsenide monolithic microwave integrated circuits (MIMICs) : R M NAGARAJAN, S D RASK (Gallium Arsenide Components Group, Unisys Corp., Eagan, MN, USA) Proc. SPIE — Int. Soc. Opt. Eng. (USA), vol. 923, pp. 266–273 (1988). (Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies VII, Santa Clara, CA, USA, 2–4 March 1988)

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 103 KB

A feasibility study for the fabrication

A feasibility study for the fabrication of planar silicon multichip modules using electron beam lithography for precise location and interconnection of chips : Andy Hopper et al. IEEE Trans. Compon. Hybrids mfg Technol. 15, 97 (1992)

📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 118 KB