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The study of selectivity in silicon selective epitaxial growth

✍ Scribed by Liang Ye; B.M. Armstrong; H.S. Gamble

Book ID: 103599175
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 431 KB
Volume: 25
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(94)90011-6

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