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Selective Epitaxial Deposition of Silicon

✍ Scribed by JOYCE, B. D.; BALDREY, J. A.

Book ID: 118673947
Publisher: Nature Publishing Group
Year: 1962
Tongue: English
Weight: 292 KB
Volume: 195
Category: Article
ISSN: 0028-0836
DOI: 10.1038/195485a0

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