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The pattern dependence of selectivity in low pressure selective epitaxial silicon growth

✍ Scribed by J. T. Fitch; D. J. Denning; D. Beard

Book ID: 112817448
Publisher: Springer US
Year: 1992
Tongue: English
Weight: 988 KB
Volume: 21
Category: Article
ISSN: 0361-5235
DOI: 10.1007/bf02660411

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