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Growth pressure dependence of selective area metalorganic vapor phase epitaxy on planar patterned substrates

✍ Scribed by Takuya Fujii; Mitsuru Ekawa; Susumu Yamazaki

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 567 KB
Volume: 156
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(95)00256-1

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