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The structure measurement of micro-electro-mechanical system devices by the optical feedback tomography technology

✍ Scribed by Xu, Chunxin; Tan, Yidong; Zhang, Shulian; Zhao, Shijie

Book ID: 121485549
Publisher: American Institute of Physics
Year: 2013
Tongue: English
Weight: 934 KB
Volume: 102
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.4807283

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