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The structure and electronic properties of silicon oxynitride gate dielectrics

✍ Scribed by Plucinski, K J; Kityk, I V; Kasperczyk, J; Sahraoui, B

Book ID: 120824698
Publisher: Institute of Physics
Year: 2001
Tongue: English
Weight: 254 KB
Volume: 16
Category: Article
ISSN: 0268-1242
DOI: 10.1088/0268-1242/16/6/308

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