Performance dependence of CMOS on silicon substrate orientation for ultrathin oxynitride and HfO2 gate dielectrics

✍ Scribed by Min Yang, ; Gusev, E.P.; Meikei Ieong, ; Gluschenkov, O.; Boyd, D.C.; Chan, K.K.; Kozlowski, P.M.; D'Emic, C.P.; Sicina, R.M.; Jamison, P.C.; Chou, A.I.

• Book ID: 120177764
• Publisher: IEEE
• Year: 2003
• Tongue: English
• Weight: 266 KB
• Volume: 24
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2003.812565