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The structural and acoustic properties of sputtered aluminum nitride on ST-X quartz

✍ Scribed by Sean Wu; Long Wu; Feng-Chih Chang; Yu-Tang Shen; Jia-Hua Chang

Book ID: 110314531
Publisher: Springer
Year: 2001
Tongue: English
Weight: 138 KB
Volume: 20
Category: Article
ISSN: 0261-8028
DOI: 10.1023/a:1012583016260

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