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The characterization of sputtered polycrystalline aluminum nitride on silicon by surface acoustic wave measurements

✍ Scribed by H. Liaw; F. Hickernell

Book ID: 126738266
Publisher: IEEE
Year: 1995
Tongue: English
Weight: 999 KB
Volume: 42
Category: Article
ISSN: 0885-3010
DOI: 10.1109/58.384450

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