✦ LIBER ✦
Characteristics of hydrogenated aluminum nitride films prepared by radio frequency reactive sputtering and their application to surface acoustic wave devices
✍ Scribed by Yong, Yoon-Joong
- Book ID
- 126937651
- Publisher
- AVS (American Vacuum Society)
- Year
- 1997
- Tongue
- English
- Weight
- 491 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.580496
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