Deposition parameter studies and surface acoustic wave characterization of PECVD silicon nitride films on lithium niobate

✍ Scribed by Hines, J.H.; Malocha, D.C.; Sundaram, K.B.; Casey, K.J.; Lee, K.R.

• Book ID: 120199383
• Publisher: IEEE
• Year: 1995
• Tongue: English
• Weight: 383 KB
• Volume: 42
• Category: Article
• ISSN: 0885-3010
• DOI: 10.1109/58.384449