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Structural and optical properties of titanium aluminum nitride films (Ti[sub 1−x]Al[sub x]N)

✍ Scribed by A. Schüler; V. Thommen; P. Reimann; P. Oelhafen; G. Francz; T. Zehnder; M. Düggelin; D. Mathys; R. Guggenheim

Book ID: 126077278
Publisher: AVS (American Vacuum Society)
Year: 2001
Tongue: English
Weight: 875 KB
Volume: 19
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.1359532

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