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The sputter deposition process: a Monte-Carlo study

✍ Scribed by Thomas Heberlein; Gunter Krautheim; Werner Wuttke

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 500 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)90076-u

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