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Monte Carlo studies of sputtering

✍ Scribed by L.G. Haggmark; W.D. Wilson

Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 691 KB
Volume: 76-77
Category: Article
ISSN: 0022-3115
DOI: 10.1016/0022-3115(78)90128-9

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