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Monte Carlo simulation of the particle transport process in sputter deposition

✍ Scribed by T. Motohiro; Y. Taga

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 644 KB
Volume: 112
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(84)90493-0

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