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The rf-power dependences of the deposition rate, the hardness and the corrosion-resistance of the chromium nitride film deposited by using a dual ion beam sputtering system

✍ Scribed by Jongmin Lim; Chongmu Lee


Book ID
113781482
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
249 KB
Volume
95
Category
Article
ISSN
0254-0584

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