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Laser damage resistance of hafnia thin films deposited by electron beam deposition, reactive low voltage ion plating, and dual ion beam sputtering

✍ Scribed by Gallais, Laurent ;Capoulade, Jérémie ;Natoli, Jean-Yves ;Commandré, Mireille ;Cathelinaud, Michel ;Koc, Cian ;Lequime, Michel

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