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Comparision of residual stress and optical properties in Ta2O5 thin films deposited by single and dual ion beam sputtering

✍ Scribed by S.G. Yoon; Y.T. Kim; H.K. Kim; M.J. Kim; H.M. Lee; D.H. Yoon

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 196 KB
Volume: 118
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2004.12.055

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