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Deposition of PTFE thin films by ion beam sputtering and a study of the ion bombardment effect

✍ Scribed by J.L He; W.Z Li; L.D Wang; J Wang; H.D Li

Book ID: 114169570
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 151 KB
Volume: 135
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(97)00630-7

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