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Low temperature deposition of ITO thin films by ion beam sputtering

✍ Scribed by Donghwan Kim; Younggun Han; Jun-Sik Cho; Seok-Keun Koh

Book ID: 118549979
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 754 KB
Volume: 377-378
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(00)01388-2

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