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ZnO thin films deposited by capillaritron ion beam sputtering deposition

✍ Scribed by Liang-Chiun Chao; Dong-Yi Tsai; Yu-Ren Shih

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 601 KB
Volume: 267
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2009.06.102

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