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Low-temperature preparation of ITO films by dual ion beam sputtering

✍ Scribed by Yoshifumi Suzaki; Tomokazu Shikama; Osamu Tanaka; Hiroshi Higuchi; Shigeaki Nakamura

Publisher
John Wiley and Sons
Year
1999
Tongue
English
Weight
148 KB
Volume
82
Category
Article
ISSN
8756-663X

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