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The relationship between the macroscopic properties of PECVD silicon nitride and oxynitride layers and the characteristics of their networks

✍ Scribed by M. Klanjšek Gunde; M. Maček


Book ID
106024109
Publisher
Springer
Year
2002
Tongue
English
Weight
529 KB
Volume
74
Category
Article
ISSN
1432-0630

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