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Electrical breakdown voltage characteristics of buried silicon nitride layers and their correlation to defects in the nitride layer

✍ Scribed by C.M.S. Rauthan; J.K. Srivastava


Book ID
119124391
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
652 KB
Volume
9
Category
Article
ISSN
0167-577X

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