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Differences in the electrical properties of the interfaces of PECVD silicon nitride with amorphous and crystalline silicon

✍ Scribed by M.C. Habrard; M. Bensouda; J.C. Bruyere; D. Jousse

Book ID
115986831
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
206 KB
Volume
115
Category
Article
ISSN
0022-3093

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