The physics of macroporous silicon formation
โ Scribed by V. Lehmann
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 421 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0040-6090
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## Abstract Nanopores and macropores can be formed electrochemically on pโtype silicon depending on the silicon resistivity and composition of the electrolyte. In order to understand if the structural dimensionality of the porous pโtype Si, either nanopore or macropore formation, depends on the ele
Using specially ``designedยบ electrolytes, it is possible to obtain macropores even in highly doped n-type silicon (0.020ยฑ0.060 Wcm) without illumination. Based on predictions of the ยชcurrent-burstmodelยบ [phys. stat. sol. (a) 182, 63 (2000), this issue], HF-containing electrolytes were systematically