Anodic silicon etching; the formation of uniform arrays of macropores or nanowires

✍ Scribed by van den Meerakker, J. E. A. M. ;Elfrink, R. J. G. ;Weeda, W. M. ;Roozeboom, F.

• Publisher: John Wiley and Sons
• Year: 2003
• Tongue: English
• Weight: 220 KB
• Volume: 197
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200306468