Ordered macropore formation in silicon
✍ Scribed by Starkov, V. V.
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 293 KB
- Volume
- 197
- Category
- Article
- ISSN
- 0031-8965
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Using specially ``designedº electrolytes, it is possible to obtain macropores even in highly doped n-type silicon (0.020±0.060 Wcm) without illumination. Based on predictions of the ªcurrent-burstmodelº [phys. stat. sol. (a) 182, 63 (2000), this issue], HF-containing electrolytes were systematically
## Abstract Nanopores and macropores can be formed electrochemically on p‐type silicon depending on the silicon resistivity and composition of the electrolyte. In order to understand if the structural dimensionality of the porous p‐type Si, either nanopore or macropore formation, depends on the ele
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