Using specially ``designedº electrolytes, it is possible to obtain macropores even in highly doped n-type silicon (0.020±0.060 Wcm) without illumination. Based on predictions of the ªcurrent-burstmodelº [phys. stat. sol. (a) 182, 63 (2000), this issue], HF-containing electrolytes were systematically
Macropore Formation on Medium Doped p-Type Silicon
✍ Scribed by Lust, S. ;L�vy-Cl�ment, C.
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 127 KB
- Volume
- 182
- Category
- Article
- ISSN
- 0031-8965
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