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The performance assessment of sputter ion pumps

✍ Scribed by D Andrew


Publisher
Elsevier Science
Year
1966
Tongue
English
Weight
762 KB
Volume
16
Category
Article
ISSN
0042-207X

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✦ Synopsis


The design and operating technique for an apparatus for the measurement of pump speeds of sputter ion pumps in the range 10 to 100 litres/sec is described. In spite of the precautions taken a large variation in the measured value is observed. The speed of a sputter ion pump is found to depend both on the initial condition of the pump and the operating condit.'o~s during the measurement. It is found experimentally that operating the pump at high pressures of argon is a practical method for obtaining a repeatable pump condition prior to measurement of the pump speed. The subsequent pump speed observed for nitrogen flow gas is found to fall as a function of the quantity of gas pumped. It appears necessary to further investigate this phenomenon using a partial pressure analyser. Alternative known methods of evaluation of pump performance are discussed but are seen to suffer similar difPculties.


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