The performance assessment of sputter ion pumps
β Scribed by D Andrew
- Publisher
- Elsevier Science
- Year
- 1966
- Tongue
- English
- Weight
- 762 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0042-207X
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β¦ Synopsis
The design and operating technique for an apparatus for the measurement of pump speeds of sputter ion pumps in the range 10 to 100 litres/sec is described. In spite of the precautions taken a large variation in the measured value is observed. The speed of a sputter ion pump is found to depend both on the initial condition of the pump and the operating condit.'o~s during the measurement. It is found experimentally that operating the pump at high pressures of argon is a practical method for obtaining a repeatable pump condition prior to measurement of the pump speed. The subsequent pump speed observed for nitrogen flow gas is found to fall as a function of the quantity of gas pumped. It appears necessary to further investigate this phenomenon using a partial pressure analyser. Alternative known methods of evaluation of pump performance are discussed but are seen to suffer similar difPculties.
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