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Comparison of diode and triode sputter-ion pumps


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
160 KB
Volume
28
Category
Article
ISSN
0042-207X

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πŸ“œ SIMILAR VOLUMES


The performance assessment of sputter io
✍ D Andrew πŸ“‚ Article πŸ“… 1966 πŸ› Elsevier Science 🌐 English βš– 762 KB

The design and operating technique for an apparatus for the measurement of pump speeds of sputter ion pumps in the range 10 to 100 litres/sec is described. In spite of the precautions taken a large variation in the measured value is observed. The speed of a sputter ion pump is found to depend both o