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Gas evolution during baking of sputter-ion pumps

✍ Scribed by J.C. Rivière; J.D. Allinson


Publisher
Elsevier Science
Year
1964
Tongue
English
Weight
515 KB
Volume
14
Category
Article
ISSN
0042-207X

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The performance assessment of sputter io
✍ D Andrew 📂 Article 📅 1966 🏛 Elsevier Science 🌐 English ⚖ 762 KB

The design and operating technique for an apparatus for the measurement of pump speeds of sputter ion pumps in the range 10 to 100 litres/sec is described. In spite of the precautions taken a large variation in the measured value is observed. The speed of a sputter ion pump is found to depend both o