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The performance assessment of sputter ion pumps : D. Andrew, Vacuum16, No. 12, p. 653.

Publisher
Elsevier Science
Year
1967
Tongue
English
Weight
110 KB
Volume
6
Category
Article
ISSN
0026-2714

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The performance assessment of sputter io
The performance assessment of sputter ion pumps
โœ D Andrew ๐Ÿ“‚ Article ๐Ÿ“… 1966 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 762 KB

The design and operating technique for an apparatus for the measurement of pump speeds of sputter ion pumps in the range 10 to 100 litres/sec is described. In spite of the precautions taken a large variation in the measured value is observed. The speed of a sputter ion pump is found to depend both o